The entertainer covered Kings of Leon, Prince and Alanis Morissette during a Pyramid Stage performance which also included her biggest solo hits and a number of Destiny's Child songs.
Beyoncé told the BBC after her set: "This night was a dream. I felt like a rock star, and the crowd, they looked like rock stars, and I'm just so honoured, really. This is... the highlight of my career."
The singer, whose new album 4 is released this week in both the UK and the US, also said that she believed her husband Jay-Z's successful headlining performance in 2008 had paved the way for her own show.
Beyoncé said: "I was able to see my husband perform here a couple of years ago and it was one of the most exciting nights for me. I don't know if I would have been asked to come if he didn't do the performance.
"I'm so happy because, you know, I don't normally do festivals and 175,000 people and... I was very nervous.
"Everyone gave me so much love and I will never, ever, ever forget this night."
Beyoncé also quipped that Coldplay frontman Chris Martin had checked her plans for the festival.
She said: "I sent Chris my setlist and made sure he approved it, because of course he's the master of this."
Coldplay headlined the festival on Saturday night, performing a number of new tracks which are expected to feature on their forthcoming fifth studio album.
Watch Beyoncé's post-performance interview with the BBC in full below:
More from Glastonbury 2011:
> Pulp return to Glastonbury after 13 years
> Plan B covers Paolo Nutini, Seal at Glastonbury
> Tinie Tempah thanks fans for memorable Glastonbury set
> U2 cover Coldplay, Beyoncé at dazzling Glastonbury show
> Glastonbury 2011: In pictures