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Jessica Gibson, who worked for Lowe and his wife Sheryl on-and-off for seven years, said the actor "placed his hand inside [her] pants in order to touch her crotch" on a number of occasions between September 2005 and January 2008.
He also "grabbed [her] buttocks without consent", according to a lawsuit filed by the 24-year-old in a California court.
The legal action is a response to a suit filed by the Brothers & Sisters star on April 7, which accused Gibson of violating confidentiality agreements signed when she was employed.
Lowe claimed last week that she had demanded £750,000 by April 11 or she would go to the press with a "laundry list" of allegations.
He called the move - which Gibson denies - "an attempt to damage and humiliate not only my wife and me, but our two young sons as well".
People reports that the ex-nanny also accused Sheryl of harassment, saying she walked around naked, make vulgar remarks and constantly talked about the couple's sex life.
Lowe's lawyer Stanton 'Larry' Stein slammed the claims, saying: "An investigation of dozens of present and former employees has failed to find one single person to verify her allegations. The allegations in the complaint are simply untrue".
Lowe and his wife are also suing former nanny Laura Boyce and ex-family chef Peter Clements in separate cases.
> Interview: Rob Lowe
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