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ITV Pictures
The widely-advertised show, set in London's famous private medical district, drew a below-par 3.9m (17.5%) in the 9pm hour.
Harley Street was the first drama ITV has aired in high definition on ITV HD, available to Freesat viewers since last month, though the channel suffered technical problems last night.
ITV1's performance left it trailing BBC One where the final episode of fraud documentary On The Fiddle? attracted 5.2m (23.6%) at the same time.
On Channel 4, the nightly Big Brother roundup interested 3m (13.5%) in the 9pm hour, followed by a strong 358,000 on Channel 4+1.
BBC Two's half-hour comedies, Mock The Week and newcomer Lab Rats, drew 2.6m (11.9%) and 1.3m (5.9%) respectively, while 1m (4.6%) watched The Hotel Inspector on Five.
The most-watched programme on a digital-only channel in the 9pm hour was The Unseen Alistair Cooke, which brought in 409,000 (2.2%) to BBC Four.
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