The 8pm results show, which saw Lucie Jones voted off after landing in the bottom two with John & Edward, drew an impressive 14.36m (49.4%). The previous high for the series came last Sunday, when Rachel Adedeji's elimination pulled in 13.87m (47.8%).
The Xtra Factor also performed well last night, hitting a new high of 2.35m (9%) for ITV2 in the 9pm hour.
Also on the multichannel stations, Sky1's 9pm screening of
BBC One's Antiques Roadshow had 5.89m (20.3%) at 8pm, then 3.92m (14.1%) tuned in for Garrow's Law: Tales From The Old Bailey at 9pm.
Ray Mears's Northern Wilderness attracted 1.86m (6.4%) to BBC Two at 8pm. Charley Boorman: Sydney To Tokyo By Any Means followed at 9pm, bringing in 1.54m (5.5%).
The 8pm screening of Come Dine With Me interested 1.27m (4.4%) for Channel 4, then the audience climbed to 3.01m (13.8%) for Die Hard 4.0, which aired between 9pm and 11.30pm.
Five's film double bill kicked off with Vertical Limit, which drew 793k (3%) between 6.40pm and 9pm, then Miss Congeniality averaged 1.17m (5%) between 9pm and 11.15pm.
Overall, ITV1 dominated primetime with an average share of 32.1% to BBC One's 19.2%. Channel 4 was third with 8.1% (+1: 1.1%), followed by BBC Two with 7.6% and Five's 3.8%.
BARB ratings data supplied by Attentional