The semi-finals results show, which saw Danyl Johnson voted off the competition, pulled in 13.01m (46.2%) between 7.30pm and 8.30pm.
Post-X Factor, 4.67m (20.1%) stayed with ITV1 for Batman Begins, which aired between 8.30pm and 11pm.
Over on BBC One, Antiques Roadshow logged 6.16m (21.6%) at 8pm, then the audience dropped to 5.02m (20.7%) for Small Island, which aired between 9pm and 10.30pm.
James May On The Moon put in 1.12m (4%) for BBC Two at 7.30pm, then 5.4m (19.7%) watched Top Gear at 8.30pm. Miranda followed at 9.30pm, drawing 2.12m (8.8%).
Come Dine With Me managed 1.39m (4.9%) during the 8pm hour, then 730k (3.5%) tuned in for Happy-Go-Lucky between 9pm and 11pm.
Five's movie double bill kicked off with Kelly's Heroes, which averaged 1.15m (4.6%) between 6.10pm and 9pm. Blood Work followed, pulling in 1.58m (7.2%) between 9pm and 11.10pm.
Overall, ITV1 came top during primetime with an average share of 28.3% to BBC One's 21%. BBC Two was third with 10%, followed by Five's 5.7% and Channel 4 with 4.1% (+1: 0.6%).
Elsewhere, The Xtra Factor grabbed 1.92m (7.4%) for ITV2 at 8.30pm, and Sky1's screening of the latest House had 568k (2.4%) during the 9pm hour.
BARB ratings data supplied by Attentional