The latest instalment, which saw the remaining four contestants perform Michael Jackson songs, was up slightly on the previous week's ratings and up significantly on the 9.72m (39.2%) who saw the equivalent episode of last year's series.
ITV2's The Xtra Factor logged 769k (3.6%) in the hour after the ITV1 show.
Earlier on ITV1, Totally You've Been Framed! pulled in 4.85m (21.3%) between 6.30pm and 7.30pm, then highlights show Harry Hill's the Best Of TV Burp managed 6.16m (25.3%).
Later, Rod Stewart: One Night Only appealed to 5.27m (24%).
The latest episode of Merlin delivered a steady 5.3m (26.2%) for BBC One at 5.55pm, then at 6.40pm, the latest Strictly Come Dancing performances show averaged 8.93m (37.9%) over 90 minutes. The Lottery draw had 4.57m (18.6%), then a visit to Casualty interested 4.16m (16.5%).
The Impressions Show With Culshaw and Stephenson took 3.9m (16%) at 9.10pm, then half an hour later, the Strictly Come Dancing results show, during which Laila Rouass and Anton Du Beke were voted off, logged 7.34m (31.2%).
Channel 4's screening of action sequel Speed 2: Cruise Control averaged 750k (3%) between 7.20pm and 9.40pm, then supernatural thriller Premonition grew the audience to 1.19m (6.2%).
Five's evening of US crime dramas started with NCIS, which picked up 778k (3.2%) at 7.20pm. CSI: NY followed with 788k (3.1%), then CSI had 901k (3.8%) and Law & Order: SVU had 886k (4.6%). CSI: NY rounded out the night with 871k (7.1%).
BBC Two's rerun of 1983 spy drama An Englishman Abroad averaged 800k (3.3%) between 7.20pm and 8.25pm, then a double-bill of monologue series Talking Heads had 1.06m (4.2%) and 1.25m (5%). Being Alan Bennett - a profile of the veteran writer - followed with 1.27m (5.6%).
Overall, ITV1 was comfortably ahead in primetime with an average share of 34.2% to BBC One's 26.2%. BBC Two was third with 4.4%, followed by Channel 4 with 3.8% (+1: 0.6%) and Five with 3.5%.
BARB ratings data supplied by Attentional