The Big Bang Theory - which saw the return of Wil Wheaton - dropped one tenth but still topped the night with a 5.1 score and a big 16.68 million viewers at 8pm.
Two and a Half Men climbed four-tenths from last week to 4.0 (14.09m) at 8.30pm.
Person of Interest matched last week's 2.9 (14.87m) at 9pm, but Elementary dropped to a series low of 2.2 (10.90m) at 10pm.
Fox's The X Factor levelled with last week's 2.3 (6.33m) at 8pm. Glee returned a tenth lower than its last original with 2.4 (5.68m) at 9pm.
ABC's Last Resort climbed a tenth from its last episode to 1.4 (5.98m) at 8pm.
Grey's Anatomy's special episode focusing on Meredith and Cristina climbed three-tenths to 3.3 (9.26m) at 9pm. Scandal dipped a tenth to 1.9 (6.06m) at 10pm.
NBC's The Voice fell to 3.0 (8.83m), dropping to its lowest ever results show score.
The Office climbed four-tenths from its last original to 2.4 (4.83m) at 9pm. Parks and Recreation matched last week's 1.7 (3.46m) at 9.30pm.
The CW's Vampire Diaries was even with last week's 1.5 (3.02m) at 8pm, while Beauty and the Beast rose a tenth to 0.7 (1.84m) at 9pm.